The World’s Largest CMP Tech Portfolio

Entrepix History

Founded in 1998, Entrepix, Inc. embarked on its journey to become the most recognized independent provider of chemical mechanical polishing (CMP) technology. An early pioneer of the refurbished equipment market, Entrepix subsequently launched the first CMP outsourcing service, through which it developed and now operates the world’s largest CMP technology portfolio.

Today Entrepix is the OEM for new OnTrak cleaners and has heavily invested in engineering and fabrication resources to design, develop, and manufacture upgrades, obsolescence solutions, sub-assemblies, and complete electro-mechanical systems for CMP-style polishing and cleaning as well as aerospace defense contracting.

Entrepix has a solid track record as a trusted expert in an industry with exacting demands of its vendors. Today, Entrepix proudly serves a long and growing list of customers that includes many of the world’s most prominent IC fabricators, OEMs, materials suppliers, and defense contractors.

In 2023 Entrepix, Inc. was acquired by Amtech Systems, Inc. a global manufacturer of capital equipment, including thermal processing and wafer polishing and related consumables used in the fabrication of semiconductor devices, such as silicon carbide (SiC) and silicon power, analog and discrete devices, and electronic assemblies and modules. Entrepix joins other Amtech companies including BTU International, PR Hoffman and Intersurface Dynamics.

The Globally Recognized Expert in CMP and Wafer Cleaning

As CMP and cleaning experts, we develop hardware, software processes, and applications solutions that enhance Applied Materials, OnTrak, and other platforms for device manufacturers, materials providers, and OEMs themselves.

New cleaners and cleaning modules

Entrepix is the new system manufacturer of OnTrak DSS-200 platform tools (highly upgraded from legacy OnTrak platforms), and incorporates cleaning modules derived from these proven technologies into other OEM tools.

Engineered Products

Our expert engineering team handles performance upgrades, obsolescence replacement, maintenance parts, sub-assemblies, PM-refurbishment module exchange, and electro-mechanical assembly fabrication for OEMs in the semiconductor and aerospace defense industries.

Services

Our in-house foundry offers CMP services (1”-12”), process development and fab transfer, on-site or in-house training, service engineering, and harvest and remanufacturing of customer-owned equipment.

Our Values

Entrepix builds its service around four key values:

Service: We deliver how, when, and what you want.
Humility: We learn and collaborate with respect for all.
Courage: We trust ourselves, innovate, and actively engage with creative ideas and solutions.
Optimism: We are happy to come to work and happy to go home.